HYBRID COMPOUND, RESIST MATERIAL AND METHOD OF FORMING PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a hybrid compound that is used as a base polymer for the resist material and shows excellent adhesion to the metal base plate. SOLUTION: The hybrid compound comprises a phenolic resin and a silicone resin that is obtained by hydrolyzing and condensing an organoxysilane represented by general formula (1): R<1> n Si(OR<2> )4-n (wherein R<1> is a monovalent hydrocarbon group including sulfur or oxygen atoms; R<2> is a monovalent hydrocarbon group; n is 1 or 2).