| 摘要 |
PROBLEM TO BE SOLVED: To develop an inspection method capable of evaluation even if there are a plurality of spots in one scanning line, in an inspection device for inspecting a scanning optical system by means of spot evaluation on an image surface. SOLUTION: A slit is disposed with a rotary deflector operated and its transmission light is detected. A transmission light detector is mounted on a stage and moved, and the inside of the scanning line is measured as a whole. All data are fetched into a processing device and a three-dimensional graph obtained by arranging data for respective points is created by setting the horizontal axis at the distance of a reference position and the vertical axis at the stage position. In the graph, the cross-sectional data at the distance from a certain reference position shows an intensity distribution on an image surface with the rotary deflector stopped. Even if there are the plurality of spots, they can be detected by one-time measurement because they are temporally decomposed.
|
