X-RAY IMAGE DETECTOR HAVING GAS CHARGE AMPLIFYING LAYER

摘要

PURPOSE: An X-ray image detector is provided to obtain images of high resolution from the small amount of X-ray radiation, while maintaining the voltage for detecting electrical signals generated from the X-ray receptor layer low. CONSTITUTION: An X-ray image detector comprises a TFT substrate(100) serving as a readout unit for detecting electrical image signals; a first electrode layer(200) formed on the TFT substrate, and which serves as a charge collector electrode; a charge amplifying layer(330) formed on the first electrode layer and constituted by mixture gas containing 90% argon and 10% methane; an electron passing layer(320) made of a conductive material formed on the charge amplifying layer, and which cooperates with the first electrode layer so as to form a mixture gas chamber of the charge amplifying layer; a photo-conductor layer(310) formed on the electron passing layer, and which generates electron-hole pairs by X-ray or visible ray; a phosphor layer(400) formed on the photo-conductor layer, and which converts incident X-ray to visible light; a second electrode layer(500) formed on the phosphor layer; and a shield layer(450) formed between the second electrode layer and the phosphor layer, and which shields noises generated from the second electrode.