发明名称 Melt through contact formation method
摘要 A thin film photovoltaic devices is described, having a glass substrate 11 over which is formed a thin film silicon device having an n++ layer 12, a p layer 13 and a dielectric layer 14 (typically silicon oxide or silicon nitride). To create a connection through the p layer 13 to the underlying n++ layer 12, a column of semi-conductor material is heated, the column passing through the various doped layers and the material in the column being heated or melted to allow migration of dopant between layer of the device in the region of the column.
申请公布号 US6551903(B1) 申请公布日期 2003.04.22
申请号 US20010807373 申请日期 2001.05.31
申请人 PACIFIC SOLAR PTY. LIMITED 发明人 SHI ZHENGRONG;BASORE PAUL ALAN;WENHAM STUART ROSS;ZHANG GUANGCHUN;CAI SHIJUN
分类号 H01L21/28;H01L21/268;H01L31/0224;H01L31/0352;H01L31/04;H01L31/18;(IPC1-7):H01L21/76 主分类号 H01L21/28
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