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发明名称
摘要
Disclosed are partially fluorinated and fully fluorinated polymers that are substantially transparent to ultraviolet radiation at wavelengths from 140 to 186 nanometers.
申请公布号
JP2003514956(A)
申请公布日期
2003.04.22
申请号
JP20010539075
申请日期
2000.11.16
申请人
发明人
分类号
G02B1/04;C08F14/18;C08F34/00;C08F214/18;C08F224/00;C08F234/02;C09J127/16;C09J127/20;G03F1/14;G03F1/62;G03F7/004;G03F7/032;G03F7/09;H01L21/027;(IPC1-7):C08F34/00
主分类号
G02B1/04
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