| 摘要 |
PROBLEM TO BE SOLVED: To reliably remove many inorganic materials and particles by switching between cleaning by a supercritical fluid and cleaning by a subcritical fluid within the same cleaning tank. SOLUTION: This cleaning device which cleans an article to be cleaned by bringing a cleaning medium in a supercritical state into contact with the article to be cleaned W within the cleaning tank 1, is provided with an external heat exchanger 5 and an internal heat exchanger 6 which maintain the cleaning medium in contact with the article to be cleaned in the supercritical state or the subcritical state, a sensor 20 which detects the degree of contamination of the cleaning medium after cleaning, and a control means which carries out a first cleaning process for maintaining the cleaning medium in the supercritical state and cleaning the article to be cleaned by controlling the heat exchangers 5 and 6 at a high temperature side and which carries out a second cleaning process for maintaining the cleaning medium in the subcritical state and cleaning the article to be cleaned by controlling the heat exchangers 5 and 6 at a cold temperature side after discriminating the completion of the first cleaning process on the basis of the output of the sensor 20. When carrying out the first and second cleaning processes, the flow of the cleaning medium is formed in the cleaning tank 1 by a circulation line L2.
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