发明名称 Valuation of tester accuracy
摘要 Tester edge placement accuracy (EPA) is important for testing of semiconductor component devices. The value of that accuracy is quantified to the device manufacturer in terms of yield loss and bad parts sold as good parts (escapes in DPM). A simulation is presented that models the tester accuracy, the device edge distribution and their interaction for a example device having an operating speed of 800 Mbps. The same model can be applied for microprocessors or other parts that operate near the limits of ATE performance. In an example given, the estimated losses due to lack of appropriate tester accuracy are considerable: with the estimated yields and selling prices for the example device, the model shows a value of over $1 M for every 1 ps of enhanced tester edge placement accuracy.
申请公布号 US6553522(B1) 申请公布日期 2003.04.22
申请号 US20000510101 申请日期 2000.02.22
申请人 SCHLUMBERGER TECHNOLOGIES, INC. 发明人 DALAL WAJIH;MIAO SONG
分类号 G01R31/319;G01R31/3193;(IPC1-7):G01R31/28 主分类号 G01R31/319
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