Preparation of metal imino/amino complexes for metal oxide and metal nitride thin films

摘要

This invention relates to an improved process to produce metal imino/amino complexes having the formula R1N=M(NR2R3)3 where M is a pentavalent metal or (R1N=)2M'(NR2R3)2 where M' is a hexavalent metal. In the process MX5 and two-equivalents of primary amine R1NH2 or metal hexahalide, M'X6 with seven-equivalents of primary amine H2NR1 are reacted in the presence of excess pyridine. The resulting reaction product R1N=MX3(py)2 or [(R1N)2M'X2(py)]2 then is followed by the addition of LiNR2R3. The process provides the final product in high yield and in high purity as well as representing a simplified procedure for synthesizing R1N=M(NR2 R3)3 or (R1N=)2M'(NR2R3)2type complexes.