发明名称 |
Method of cleaning a semiconductor wafer with a cleaning brush assembly having a contractible and expandable arbor |
摘要 |
A method of cleaning a semiconductor wafer using a cleaning brush assembly having an arbor with: (1) an expandable member configured to have a non-expanded position and an expanded position, and (2) a cleaning brush, located about the expandable member, having an inner diameter greater than an outer diameter of the expandable member in the non-expanded position and less than an outer diameter of the expandable member in the expanded position.
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申请公布号 |
US6551410(B2) |
申请公布日期 |
2003.04.22 |
申请号 |
US20000737717 |
申请日期 |
2000.12.15 |
申请人 |
AGERE SYSTEMS INC. |
发明人 |
CREVASSE ANNETTE M.;EASTER WILLIAM G.;MAZE JOHN A.;MICELI FRANK |
分类号 |
B08B1/04;(IPC1-7):A46B17/02;B08B1/00 |
主分类号 |
B08B1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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