发明名称 Systems and methods for application of substantially dry atmospheric plasma surface treatment to various electronic component packaging and assembly methods
摘要 This invention is related to a method for encapsulating bond regions in electronic components comprising, for example, metallic bond regions, the method comprising the steps of exposing an electronic component having at least one bond region through a primary gas atmosphere comprising unstable or excited gaseous species, the gaseous species being substantially devoid of any electrical charges, the primary gas atmosphere having a pressure ranging from about 0.5x105 Pa to about 3.0x105 Pa, thereby forming a treated, non-encapulated electronic component, then encapsulating the electronic component.
申请公布号 US6551860(B2) 申请公布日期 2003.04.22
申请号 US20020054336 申请日期 2002.01.22
申请人 L'AIR LIQUIDE - SOCIETE ANONYME A'DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE;AMERICAN AIR LIQUIDE 发明人 UNER JASON R.;SINDZINGRE THIERRY;CARSAC CLAUDE
分类号 B23K1/20;H05K3/34;(IPC1-7):H01L21/44;H01L21/48;H01L21/50 主分类号 B23K1/20
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