发明名称 Non-tubular type recycle system of wet bench tank
摘要 A method for recycling a fluid in a wet bench tank recycling device, comprising the following steps. An outer recycle tank is provided having sides and a bottom. The outer recycle tank holding outer recycle tank fluid. An inner process tank is provided having sides and a sieved bottom housed within the outer recycle tank. The inner process tank sides being spaced apart from the sides of the outer recycle tank sides and the inner process tank bottom being spaced apart from the outer recycle tank bottom. The inner process tank holding inner process tank fluid. A wide area filter fitted within the inner process tank proximate the inner process tank sieved bottom is provided. A vertically moveable top cover is provided at an uppermost position and fitted between the inner process tank sides and the outer recycle tank sides. The top cover having one-way valves therein that permit flow of fluid only downward through the one-way valves. The vertically moveable top cover having a top and a bottom. A downward force means is provided to vertically depress the moveable top cover downward, forcing a portion of the outer recycle tank fluid through the inner process tank sieved bottom and the wide area filter whereby a portion the inner process tank fluid is forced upwardly and over the inner process tank sides and onto the top of the top cover, and whereby passage of the outer recycle tank fluid through the wide area filter recycles the outer recycle tank fluid. An upward force means is provided to then vertically raise the moveable top cover back to the top cover uppermost position, whereby the inner process tank fluid on top of the top cover passes downward through the top cover one-way valves.
申请公布号 US6551412(B1) 申请公布日期 2003.04.22
申请号 US20010905816 申请日期 2001.07.16
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY 发明人 HUANG YUAN-SHENG
分类号 B08B3/04;H01L21/00;(IPC1-7):B08B3/04;B08B7/04 主分类号 B08B3/04
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