| 摘要 |
An optical position measuring system for determining the relative position of a first object which can be moved with respect to a second object along a measuring direction includes at least one periodic measuring graduation, which is connected to the first object and a scanning unit which is connected with the second object. The scanning unit includes a light source emitting beams of light, at least one scanning graduation and a detector arrangement in a detector plane. The detector arrangement includes several radiation sensitive detector elements for scanning a periodic fringe pattern resulting from the interaction of the beams of light emitted by the light source with the at least one periodic measuring graduation and the at least one scanning graduation, wherein the detector plane is arranged spaced at a distance Zn from the last graduation passed and the distance Zn is calculated from the following equation:wherein:ZQ: is the distance of the last graduation passed from a real and virtual source point of the periodic fringe pattern,n=0, 1, 2, 3, . . . ,eta: is the phase shift in fractions of 360° of the periodic fringe pattern exiting at the last graduation passed into different directions, whereinTPeff: is an effective graduation period of the scanning device, which correctly describes the directions of the orders of diffraction exiting at the graduations last passed, which have sufficient intensity,lambd: wavelength of said light source,LAMBDvemier: period of said partial vernier fringe at the location of the last graduation passed.
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