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发明名称
Mems structure with surface potential control
摘要
申请公布号
AU2002361551(A1)
申请公布日期
2003.04.22
申请号
AU20020361551
申请日期
2002.07.22
申请人
GLIMMERGLASS NETWORKS, INC.
发明人
ANDRES FERNANDEZ;LAWRENCE P. MURAY;BRYAN P. STAKER
分类号
B81B3/00;G02B26/08;(IPC1-7):G02B26/00
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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