METHOD FOR FABRICATING HALF-METALLIC MAGNETIC OXIDE

摘要

PURPOSE: A method for fabricating half-metallic magnetic oxide is provided to supply enough energy to dissolve oxygen and generate the correct composition ratio between different metal ions such as Fe2+ and Fe3+. CONSTITUTION: A semiconductor substrate(11) is prepared on its holder(12), on the opposite side of which a target(14) is installed. Reaction gas and activation gas are supplied by a gas inlet(17). An electric power supplying unit(19) is prepared to induce the electric discharge. A ring or mesh type conductor(20), making plasma ions penetrate through its holes, is installed between the holder and target, with its own power supply(29).