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发明名称
POLISHING APPARATUS WITH ELECTROMAGNETICAL ATTITUDE CONTROLLER FOR THE POLISHING PAD CARRIER
摘要
申请公布号
KR20030031498(A)
申请公布日期
2003.04.21
申请号
KR20027017255
申请日期
2002.12.18
申请人
发明人
分类号
H01L21/304;B24B37/005;B24B41/04;B24B49/10
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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