APPARATUS OF SENSING WAFER LOADING MISS FOR SEMICONDUCTOR FABRICATION EQUIPMENT

摘要

PURPOSE: An apparatus of sensing a wafer loading miss is provided to prevent the wafer from being broken by sensing the loading miss of the water. CONSTITUTION: An apparatus of sensing a wafer loading miss has a cassette(14) for loading wafers at its slots. An optical sensor(22) is formed on the bottom of the cassette(14) to sense the protruding state of the wafer from the cassette(14) due to the loading miss of the wafer. A controller(24) receives the loading miss detection signal from the optical sensor(22), and generates an error alarm generation signal. An alarm generation unit(26) generates an alarm by way of the alarm generation signal of the controller(24).