| 摘要 |
PROBLEM TO BE SOLVED: To provide a superior optical component-mounting substrate which has a plurality of grooves of different depth that can not be formed in the same etching process and is free of shift in relative position among the respective grooves, and its manufacturing method, and an optical module. SOLUTION: A process of bonding and forming a mask pattern which has an opening part in an area where the plurality of grooves 25 and 28 of different depth are formed on a substrate 21, a process of forming an etching-resistive film 24 in a groove formation area other than the area where the groove 25 is formed, and a process of forming the groove 25 by anisotropic etching are carried out in order and then a process of forming an etching-resistive film 27 in the groove 25 not in the area where the groove 28 is formed and a process of forming the groove 28 by anisotropic etching, are performed in order.
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