| 摘要 |
PROBLEM TO BE SOLVED: To provide a small and inexpensive system capable of high-speed, high-precision, and high-stability operation. SOLUTION: The system has a control valve section 20 for controlling either fluid pressure or flow rate, a mechanical section 30 having a fluid sealing means telescoping according to fluid pressure from the control section 20 for displacing the controlled system, a sensor 40 for sensing controlled variables outputted by the controlled system, an addition/subtraction section 50 and control section 10 serving as the 1st correcting means receiving a signal of difference between the control variable target value and the signal from the sensor 40, and an addition/subtraction section 60 and control section 80 serving as the 2nd correcting means receiving a signal of difference between the signal from the control section 10 and the signal from the sensor 40. The 1st correcting means constitutes the primary control loop, and the 2nd correcting means the secondary control loop.
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