| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a reference signal generated by a crystal resonator is largely attenuated in a wiring layer. SOLUTION: A crystal device 7 consisting of a base 1 having mounting portions 1a, 1b on both top and bottom surfaces thereof, a crystal resonator 5 fixed on the top surface of the base 1 via a fixing member 8, and a semiconductor element 6 mounted on the bottom surface of the base 1 and performing temperature compensation for the resonator 5. The base 1 is a sintered body containing a crystal phase of one kind selected from among quartz, cristobalite, tridymite, or enstatite, which is obtained by baking a formed body containing 20-80 vol.% lithium silica glass containing 5-30 wt.% Li2 O and having a yield point of 400-800 deg.C and 20-80 vol.% a filler component containing one selected from among quartz, cristobalite, tridymite, enstatite or forsterite. A wiring layer 2 is formed of a metallic material having a specific electric resistance of 2.5 μΩ/cm or less, and the material 8 has an elastic modulus of 3.6 GPa or less. |
