METHOD FOR MANUFACTURING FIELD EMITTING SOURCE HAVING DIAMOND-LIKE CARBON FIELD EMITTING ELECTRODE

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive method for manufacturing a field emitting source having a diamond-like carbon field emitting electrode, capable of efficiently extracting an electron. SOLUTION: A diamond-like carbon film 12A is formed in advance on a base 11, and oxygen plasma treatment is applied to the diamond-like carbon film 12A to form an emitter electrode 12 comprising the diamond-like carbon film having a coarse surface.