发明名称 |
PHOTOSENSITIVE CERAMIC COMPOSITION |
摘要 |
PROBLEM TO BE SOLVED: To provide a photosensitive ceramic composition capable giving a photo-cured sheet having an appropriate elastic modulus because it is necessary to ensure proper conditions after via hole formation in working of a subsequent step as well as to form high definition via holes having a high aspect ratio by photolithography so as to obtain satisfactory characteristics in a high-fre quency region. SOLUTION: The photosensitive ceramic composition comprises inorganic powders and photosensitive organic components essentially including a urethane compound containing an ethylenically unsaturated group and has 0.4-5 N/mm<2> tensile strength. |
申请公布号 |
JP2003114527(A) |
申请公布日期 |
2003.04.18 |
申请号 |
JP20020223255 |
申请日期 |
2002.07.31 |
申请人 |
TORAY IND INC |
发明人 |
MASAKI YOSHIKI;YAMAHO TOMOYA;KAMIOKA TAKENORI |
分类号 |
G03F7/027;C04B35/622;C04B35/632;C08F2/44;C08F290/08;C08F299/06;G03F7/004 |
主分类号 |
G03F7/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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