发明名称 PHOTOSENSITIVE CERAMIC COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive ceramic composition capable giving a photo-cured sheet having an appropriate elastic modulus because it is necessary to ensure proper conditions after via hole formation in working of a subsequent step as well as to form high definition via holes having a high aspect ratio by photolithography so as to obtain satisfactory characteristics in a high-fre quency region. SOLUTION: The photosensitive ceramic composition comprises inorganic powders and photosensitive organic components essentially including a urethane compound containing an ethylenically unsaturated group and has 0.4-5 N/mm<2> tensile strength.
申请公布号 JP2003114527(A) 申请公布日期 2003.04.18
申请号 JP20020223255 申请日期 2002.07.31
申请人 TORAY IND INC 发明人 MASAKI YOSHIKI;YAMAHO TOMOYA;KAMIOKA TAKENORI
分类号 G03F7/027;C04B35/622;C04B35/632;C08F2/44;C08F290/08;C08F299/06;G03F7/004 主分类号 G03F7/027
代理机构 代理人
主权项
地址