METHOD OF FABRICATING LAMINATED DIELECTRIC MATERIAL

摘要

PROBLEM TO BE SOLVED: To fabricate a high quality laminated dielectric material which may be enlarged through easier adjustment of atmosphere during the baking step, without variation of composition of dielectric material of oxide and generation of disadvantage such as expansion due to the reaction with atmospheric gas. SOLUTION: A mixed gas including the desired amount of CO gas and O2 gas in addition to the CO2 gas as the major element is used for baking, in the reducing atmosphere, a laminated body 1 of a dielectric material layer 2 of oxide such as PZT, and an internal electrode layer 3 which is mainly formed of base material such as Cu. Pressure of oxygen in the atmospheric gas can be easily and stably adjusted to control variation or fluctuation of atmosphere by adjusting the amounts of CO gas and O2 gas using the equilibrium system of CO2 2CO+1/2O2 .