发明名称 THIN-FILM MAGNETIC HEAD AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To meet the requirements of setting MR element height accuracy to±0.02 mm or lower and the shape accuracy of a floating surface to±2 nm or lower in an MR head mounted on the magnetic disk device of a surface recording density 100 Gbit/in<2> . SOLUTION: Finish polishing is carried out in a slider shape, the resistance value of a resistance detection element formed in a slider is detected in an in-process and, when the detected resistance value or the height dimension of the MR element converted from the resistance value reaches a predetermined value, the polishing is stopped.
申请公布号 JP2003115102(A) 申请公布日期 2003.04.18
申请号 JP20020222339 申请日期 2002.07.31
申请人 HITACHI LTD 发明人 SEKI TAKATERU;YAMAKURA HIDEO;TAMURA TOSHIO;TAKAKURA AKIO;TANAKA KOJI
分类号 G11B5/39;G11B5/60;G11B21/21;(IPC1-7):G11B5/39 主分类号 G11B5/39
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