摘要 |
PROBLEM TO BE SOLVED: To meet the requirements of setting MR element height accuracy to±0.02 mm or lower and the shape accuracy of a floating surface to±2 nm or lower in an MR head mounted on the magnetic disk device of a surface recording density 100 Gbit/in<2> . SOLUTION: Finish polishing is carried out in a slider shape, the resistance value of a resistance detection element formed in a slider is detected in an in-process and, when the detected resistance value or the height dimension of the MR element converted from the resistance value reaches a predetermined value, the polishing is stopped.
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