发明名称 ELECTROLYTIC POLISHING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an excellent electrolytic polishing method. SOLUTION: The electrolytic polishing method for applying voltage between an anode electrode and a counter electrode in an electrolytic solution, and electrolytically polishing a material, contacting the anode electrode to the surface of the material is provided. In the method, the anode electrode is formed with such an electrode material that the current density can be 10 mA/cm<2> or lower when voltage of +2.5 V (with respect to the silver/silver chloride electrode) is applied to the electrodes in a 0.1 M perchloric acid solution in electrochemical measurement using a potentiostat.
申请公布号 JP2003113500(A) 申请公布日期 2003.04.18
申请号 JP20010307608 申请日期 2001.10.03
申请人 TOSHIBA CORP 发明人 MATSUI YOSHITAKA;KOSUKEGAWA HIROSHI;KODERA MASAKO;MIYASHITA NAOTO
分类号 B23H3/06;B23H5/08;C25F3/00;C25F3/16;C25F3/30;C25F7/00;H01L21/321;(IPC1-7):C25F7/00 主分类号 B23H3/06
代理机构 代理人
主权项
地址