| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for forming a carbon film on an inner surface of a plastic vessel, which can improves both a coating rate and a film quality of the carbon film and can uniformaize film thickness. SOLUTION: This apparatus for forming the carbon film comprises a cylindrical external electrode with a bottom, which has a size capable of surrounding the periphery of the plastic vessel when it is inserted, a claviform internal electrode to be longitudinally inserted nearly throughout its length into the plastic vessel in the cylindrical external electrode with the bottom, a vacuum vessel having a gas exhaust means, for accommodating the cylindrical external electrode with the bottom, a high frequency power source connected to the claviform internal electrode through a power supply and a matching device, and a bias power source connected to the above cylindrical external electrode with the bottom through a bias matching device. The above claviform internal electrode is characterized by having a cylindrical shape with a bottom, and a structure serving as a passage for introducing a medium gas supplied from a gas supply means, and by arranging an open hole for spouting the above medium gas, to the bottom part, or a side area within a range of 25% or less of the length inserted into the above plastic vessel from the bottom, or both of them.
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