发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device in which a withstand voltage can be improved without increasing a collector series resistance and to provide a method for manufacturing the same. SOLUTION: The semiconductor device comprises a base region (3) and an emitter region (7) formed in the base region (3) formed on the surface of an epitaxial layer (2) on a semiconductor substrate (1), and a surface silicon oxide film (5) and a metal (6) formed on the surface of the layer (2). The method for manufacturing the semiconductor device comprises the steps of completely penetrating the layer (2) from the surface of the layer (2), and forming a trench (8) so as to be superposed with the outer peripheral part of the base region (3) so as to arrive at the semiconductor substrate (1).
申请公布号 JP2003115494(A) 申请公布日期 2003.04.18
申请号 JP20010309648 申请日期 2001.10.05
申请人 SANYO ELECTRIC CO LTD 发明人 TOJO JUNICHIRO
分类号 H01L21/331;H01L29/732;(IPC1-7):H01L21/331 主分类号 H01L21/331
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