SUBSTRATE TRANSFER SYSTEM

摘要

PROBLEM TO BE SOLVED: To transfer at a high speed a substrate to be processed in a vacuum processing chamber by a vacuum stage system for transferring the substrate to be processed in an evacuated atmosphere. SOLUTION: The substrate transferring system transfers a wafer 20 mounted on a wafer platen 12 in a vacuum chamber 11. It has a first driving mechanism 13A for transferring the wafer platen 12 in the direction of Y1 and a second driving mechanism 14A, which is provided in the vacuum chamber 11 for transferring the wafer platen 12 to and fro and linearly at a high speed in the direction of X1 and X2.