| 摘要 |
PROBLEM TO BE SOLVED: To reduce a cooling cost of the dielectric barrier discharge lamp. SOLUTION: An inside tube 2 of the dielectric barrier discharge lamp 1 emitting vacuum ultraviolet light is constituted of a material not transmitting vacuum ultraviolet light, such as ozone-less quartz. The inside tube 2 is cooled with air. Even if air is used as a cooling medium, harmful ozone is not generated, the removing treatment of exhaust is made unnecessary, and a running cost can be reduced. Since the use of a material transparent to the ultraviolet light, such as expensive synthetic quartz can be reduced, the cost of a ultraviolet light source system can be reduced.
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