CATHODE STRUCTURE FOR MAGNETRON, AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a cathode structure for a magnetron of a long life by elongating the service life of a cathode by solving the short life of the cathode in a conventional magnetron device comprising barium oxide for composing the cathode which tends to peel off by repetition of oscillation and stop of oscillation. SOLUTION: In this method for manufacturing the cathode 10 for a magnetron, metal alkoxide is hydrolytically decomposed to generate micro-particulates of hydroxide. They are then deposited on a cathode substrate 11, and it is baked, thereby a thin film of oxide 12 is formed.