| 摘要 |
PURPOSE: An apparatus for filtering and discharging contaminants in a chamber is provided to improve the filtering efficiency and lifespan by filtering and discharging the contaminants in the chamber and cleaning the filter in a cyclic manner. CONSTITUTION: The first and the second filters(110,120) are connected to each other in parallel to receive the contaminants from the chamber and filter the harmful contents from the contaminants. A pressure detection member(140) is used for sensing the pressure of the contaminants discharged from the chamber. A plurality of filtering valves(131,133,135,137) are installed at the front and the rear ends of the first and the second filters(110,120) to receive the control signal in proportion to the detected pressure at the pressure detection member(140), thereby being switched on or off in a selective manner. A purge gas supply member(150) is used for supplying the gas for cleaning the first and the second filters(110,120). A plurality of cleaning valves(161,163,165,167) are installed between the purge gas supply member(150) and the first and the second filters(110,120) as well as at the front and the rear ends of the respective filters(110,120) while being switched on or off in accordance with the external control signal to supply the purge gas to the first and the second filters(110,120). A discharge fan(170) is used for discharging the air flown through the filtering valves(131,133,135,137) and the cleaning valves(161,163,165,167) installed at the rear ends of the first and the second filters(110,120). A controller(180) receives the pressure-related signal from the pressure detection member(140), and controls the respective filtering valves(131,133,135,137) to drive the first and the second filters(110,120) in a separate manner, or in a simultaneous manner. The controller(180) controls the cleaning valves(161,163,165,167) in accordance with the program pre-established at the memory(185) to clean the first and the second filters(110,120).
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