摘要 |
An LDMOS device is made on a semiconductor substrate 112. It has an N+ source and drain regions 120, 132 are formed within a P well region 122. An interlevel dielectric layer 140 encapsulates biased charge control electrodes 142a and they control the electric field within the area of the drift region 14 between P-base 122 and the N drain region 132 to increase the reverse breakdown voltage of the device. This permits the user to more heavily dope the drift region and achieve a lower on resistance.
|