发明名称 |
Measurement system with separate optimized beam paths |
摘要 |
The subject invention relates to a broadband optical metrology system that segregates the broadband radiation into multiple sub-bands to improve overall performance. Each sub-band includes only a fraction of the original bandwidth. The optical path-the light path that connects the illuminator, the sample and the detector-of each sub-band includes a unique sub-band optical system designed to optimize the performance over the spectral range spanned by the sub-band radiation. All of the sub-band optical systems are arranged to provide small-spot illumination at the same measurement position. Optional purging of the individual sub-band optical paths further improves performance.
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申请公布号 |
US2003071996(A1) |
申请公布日期 |
2003.04.17 |
申请号 |
US20020141267 |
申请日期 |
2002.05.08 |
申请人 |
WANG DAVID Y.;ROTTER LAWRENCE;FANTON JEFFREY T.;MCANINCH JEFFREY E. |
发明人 |
WANG DAVID Y.;ROTTER LAWRENCE;FANTON JEFFREY T.;MCANINCH JEFFREY E. |
分类号 |
G01B11/00;G01J3/10;G01J3/36;G01N21/21;G01N21/55;(IPC1-7):G01J4/00 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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