发明名称 Ultraviolet light source driven by capillary discharge plasma and method for surface treatment using the same
摘要 The present invention discloses an ultraviolet light source driven by a capillary discharge plasma and a method for surface treatment using the same. More specifically, an ultraviolet light source driven by a capillary discharge plasma includes an AC power supply as a power source, at least one first electrode connected to the power source, a dielectric body having at least one capillary discharge site therein and enclosing at least a portion of the first electrode, wherein each capillary discharge site is substantially aligned with each first electrode, so that the first electrode is exposed by the capillary site, at least one second electrode electrically coupled to the first electrode, a gas tight chamber enclosing the first and second electrodes and the dielectric body including a working gas, and a window attached to the chamber substantially passing only ultraviolet light from a capillary discharge plasma.
申请公布号 US2003071571(A1) 申请公布日期 2003.04.17
申请号 US20010976030 申请日期 2001.10.15
申请人 PLASMION CORPORATION 发明人 YU DONG WOO;KIM STEVEN;BECKER KURT H.
分类号 G03F7/20;H01J65/04;(IPC1-7):H01J17/49 主分类号 G03F7/20
代理机构 代理人
主权项
地址