发明名称 PLASMA SURFACE TREATMENT METHOD AND DEVICE FOR CARRYING OUT SAID METHOD
摘要 The invention relates to a plasma surface treatment method for the surface of an object or particles to be treated consisting in creating a plasma and applying said plasma against the surface to be treated. The inventive method is characterised in that the surface to be treated is excited or the plasma is made to vibrate acoustically in order to create a relative wave motion between the plasma and the surface to be treated.
申请公布号 WO02076511(A3) 申请公布日期 2003.04.17
申请号 WO2002IB01001 申请日期 2002.03.26
申请人 APIT CORP. SA;KOULIK, PAVEL;SAMSONOV, MICKHAIL;CHEREPANOV, ALEXANDER;PETROV, EVGUENII 发明人 KOULIK, PAVEL;SAMSONOV, MICKHAIL;CHEREPANOV, ALEXANDER;PETROV, EVGUENII
分类号 H05H1/24;B08B7/00;B65D23/02;B65D23/08;B65D25/34;H01J37/32;H01L21/304;H01L21/3065 主分类号 H05H1/24
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