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发明名称
Mikromechanische Vorrichtung
摘要
申请公布号
DE69529880(D1)
申请公布日期
2003.04.17
申请号
DE19956029880
申请日期
1995.11.14
申请人
TEXAS INSTRUMENTS INC., DALLAS
发明人
TREGILGAS,JOHN H.
分类号
G02B26/08;(IPC1-7):G02B26/08;G09F9/37
主分类号
G02B26/08
代理机构
代理人
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