Eddy current sensor arrays

摘要

An apparatus for the nondestructive measurements of materials. Eddy current sensing arrays are described which provide a capability for high resolution imaging of test materials and also a high probabilitity of detection for defects. These arrays incorporate layouts for the sensing elements which take advantage of microfabrication manufacturing capabilities for creating essentially identical sensor arrays, aligning sensing elements in proximity to the drive elements, and laying out conductive pathways that promote cancellation of undesired magnetic flux.