| 摘要 |
An object of the present invention is to provide a ceramic structure for improving the resistance against a corrosive substance and to diffuse and supply a fluid over a larger area of the structure. A ceramic laminated article 6 has a ceramic sintered body 1, and a ceramic film 3 provided on the sintered body 1 by means of chemical vapor deposition. A hollow 5 surrounded by the sintered body 1 and film 3, and communicating holes 1d, 4 communicated with the hollow 5 and the outside are formed in the article 6. A filling material 2 are filled in the recess 1c of the sintered body 1 and the holes 1d, 4 are formed. The thus obtained assembly 7 is heat treated to dissipate and remove the filling material 2 through the communicating holes 1d and 4, so that the recess 1c is left as the hollow 5.
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