发明名称 |
VIBRATION-INHIBITING FLOORING STRUCTURE AND CONSTRUCTION METHOD |
摘要 |
A vibration-inhibiting flooring structure for use in a facility housing vibration sensitive equipment includes a perforated bearing floor (20) which includes a number of openings (22) configured to inhibit the propagation of vibrations across the floor. Such a flooring structure may be used, for example, in connection with advanced clean-room facilities, where a facilities room (30, 1502) and one or more plenums (1506, 1508, 1510) are provided in conjunction with the vibration-inhibiting floor (20). |
申请公布号 |
WO03031743(A1) |
申请公布日期 |
2003.04.17 |
申请号 |
WO2002US29825 |
申请日期 |
2002.09.20 |
申请人 |
SPEEDFAM-IPEC CORPORATION |
发明人 |
RAPISARDA, JOSEPH;COLLEY, TIMOTHY |
分类号 |
E04B1/98;E04B5/43;E04B5/48;E04B9/02;E04F15/02;E04F15/024;E04H5/02;F24F3/16;F24F7/06;F24F7/10 |
主分类号 |
E04B1/98 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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