发明名称 VIBRATION-INHIBITING FLOORING STRUCTURE AND CONSTRUCTION METHOD
摘要 A vibration-inhibiting flooring structure for use in a facility housing vibration sensitive equipment includes a perforated bearing floor (20) which includes a number of openings (22) configured to inhibit the propagation of vibrations across the floor. Such a flooring structure may be used, for example, in connection with advanced clean-room facilities, where a facilities room (30, 1502) and one or more plenums (1506, 1508, 1510) are provided in conjunction with the vibration-inhibiting floor (20).
申请公布号 WO03031743(A1) 申请公布日期 2003.04.17
申请号 WO2002US29825 申请日期 2002.09.20
申请人 SPEEDFAM-IPEC CORPORATION 发明人 RAPISARDA, JOSEPH;COLLEY, TIMOTHY
分类号 E04B1/98;E04B5/43;E04B5/48;E04B9/02;E04F15/02;E04F15/024;E04H5/02;F24F3/16;F24F7/06;F24F7/10 主分类号 E04B1/98
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