Non-resonant microwave imaging probe

摘要

A non-resonant microwave imaging microscope and associated probe. The probe includes a sensor unit with two fixed electrodes, preferably a large outer electrode surrounding a small inner electrode which are approximately co-planar, thereby protecting the small inner electrode from an uneven topography. The outer electrode may be deposited on a conically shaped dielectric disk having a bore through which the inner electrode is placed. Non-resonant circuitry couples the inner electrode to the probe signal variably selected in the range of 10 MHz-50 GHz and to an amplifier whose output is coupled to a signal processor detector in-phase and out-of-phase components of the current or voltage across the two electrodes. A mechanical positioner moves the probe vertically towards the sample and scans it across the sample.