SEMICONDUCTOR GAS SENSOR HAVING A CIRCULAR ARRANGEMENT OF INTERDIGITAL ELECTRODES AND HEATING STRUCTURES, AND METHOD FOR THE PRODUCING THE SENSOR DURING WHICH THE SENSITIVE SEMICONDUCTOR LAYER IS APPLIED IN THE FORM OF DROPS

摘要

The invention relates to a gas sensor comprising a membrane (18), a heating structure (10) that is arranged on the membrane (18), an evaluating structure (12) that is arranged on the membrane (18), and a sensitive layer (14) that is also arranged on the membrane (18). Said layer can be heated by the heating structure (10) and its electrical resistance can be evaluated by the evaluating structure (12). The sensitive layer (14) is applied in the form of drops (16), and the remaining structures (10, 12) are at least partially adapted to the shape of the sensitive layer (14). The invention also relates to a method for producing a gas sensor.