| 发明名称 |
METHOD AND DEVICE FOR VIBRATION CONTROL |
| 摘要 |
A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electroactive material bonded to an electroded sheet. |
| 申请公布号 |
WO02073318(A3) |
申请公布日期 |
2003.04.17 |
| 申请号 |
WO2002US06974 |
申请日期 |
2002.03.07 |
| 申请人 |
ACTIVE CONTROL EXPERTS, INC. |
发明人 |
PLETNER, BARUCH;PERKINS, RICHARD;LUBLIN, LEONARD |
| 分类号 |
H01L21/027;F16F15/00;F16F15/02;F16F15/027;G03F7/20;G05D19/02;H01L41/047;H01L41/053;H01L41/09;H04R17/08 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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