发明名称 Precision bond head for mounting semiconductor chips
摘要 The present invention relates to a new and improved device adapted for mounting semiconductor components to substrates. More particularly, the device includes a housing and a first member rotatably mounted to the housing. A first interface is formed between the first member and the housing. The device also has a second member mounted in the first member. The second member is movable in an axial direction relative to the first member between a first position, in which the second member extends from the first member, and a second position, in which the second member is retracted from the first position. The second member has an engaging mechanism at an end thereof for engaging a semiconductor component when the second member is in its first position. A second interface is formed between the first and second members. The device is also provided with a supplying mechanism for supplying pressurized air to the first and second interfaces so as to form a first air bearing at the first interface and a second air bearing at the second interface. The first air bearing is sized and shaped so as to permit substantially frictionless rotational movement of the first member relative to the housing, while the second air bearing is sized and shaped so as to permit substantially frictionless rectilinear movement of the second member relative to the first member.
申请公布号 US2003071106(A1) 申请公布日期 2003.04.17
申请号 US20010981352 申请日期 2001.10.17
申请人 BENDAT ZVI;ZEIGERMAN FELIX 发明人 BENDAT ZVI;ZEIGERMAN FELIX
分类号 H01L21/60;H01L21/00;H01L21/52;(IPC1-7):B23K37/04;B23K1/14;B23K37/02 主分类号 H01L21/60
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