A MEMS MIRROR DEVICE HAVING LARGE ANGLE OUT OF PLANE MOTION USING SHAPED COMBED FINGER ACTUATORS AND METHOD FOR FABRICATION

摘要

A micro-electro-mechanical-system (MEMS) mirror device includes a mirror component that is capable of moving upon electrostatic actuation. The MEMS mirror device also includes one or more electrostatic actuators providing electrostatic actuation. The electrostatic actuators having plates disposed approximately perpendicular to the mirror component. The plates are disposed to define a gap between the plates that decreases along a direction perpendicular to a surface of the mirror component.