发明名称 ELECTROSTATICALLY ACTUATED PUMP WITH ELASTIC RESTORING FORCES
摘要 <p>Methods and apparatus for electrostatically pumping fluids without passing the fluids through the electric field of the pump are contemplated. Electrostatic forces are preferably used to move the diaphragms in one direction, while elastic and/or other restorative forces are used to move the diaphragms back to their original un-activated positions. In some embodiments, this may allow fluid to be pumped without passing the fluid between actuating electrodes. This may be particularly useful when the fluids have dielectric, conductive, polar or other qualities that may affect traditional electrostatic pump performance. Pumps having various elementary cells are contemplated, including two-celled pumps disposed within a single chamber and pumps having greater numbers of cells wherein each cell is disposed within a different chamber.</p>
申请公布号 WO2003031822(A1) 申请公布日期 2003.04.17
申请号 US2002032458 申请日期 2002.10.09
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