TUNNEL MECHANICAL VIBRATION NANOTRANSDUCER AND METHOD FOR PRODUCING SAID NANOTRANSDUCER

摘要

The inventive tunnel mechanical vibration nanotransducer relates to microsystems used for inspection technology. Said nanotransducer comprises a sensing element in the form of a monocrystalline silicon probe coated with a layer of precious metal. A polycrystalline silicon membrane provided with corrugations on the sides thereof and coated with a layer of precious metal on the side of the probe is arranged thereunder with a gap ranging from nanometric fractions to micronic fractions. Said probe is connected to an input voltage source. The nanotransducer also comprises a gap control unit, a deflecting electrode disposed around the probe and made of a precious metal, an input voltage amplifier, an analog-to-digital converter, a unit for measuring electrical capacity and a unit for limiting a tunnel current. The inventive method for producing the tunnel nanotransducer is based on a semiconductor planar technology.