| 摘要 |
An optical waveguide (22) extends vertically within the interior of an IC-like structure (20) to route optical signals between horizontal waveguides (25a-25d) in different layers of horizontal optical interconnects. A light reflecting structure (32, 34) is positioned at the intersection of the horizontal and vertical waveguides (22, 25a-25d) to reflect the light. Multiple horizontal waveguides (25a, 25b; 25c, 25d) may join the vertical waveguide (22) at a common intersection, to form a beam splitter or a beam combiner. Optical signals from one horizontal waveguide are diverted within the IC-like structure (20) into another horizontal or vertical waveguide. The waveguide is formed with a light reflective structure at an intersection of the horizontal and vertical waveguides (22, 25a-25d), and the waveguide is completed using damascene fabrication techniques. <IMAGE> |
