| 发明名称 |
METHOD FOR PRODUCING CERAMIC AND APPARATUS FOR PRODUCING THE SAME, SEMICONDUCTOR DEVICE, AND PIEZOELECTRIC DEVICE |
| 摘要 |
<p>A ceramics fabricating method which includes a step of forming a ceramic film by feeding an electromagnetic wave and an active species of a substance which is at least part of raw materials for the ceramics to a predetermined region. A film including a substance which is part of the raw materials for the ceramics may be formed in the predetermined region. The fabrication method further includes a step of feeding the active species and the electromagnetic wave to a first ceramic film to form a second ceramic film which has a crystal structure differing from that of the first ceramic film.</p> |
| 申请公布号 |
EP1205575(A4) |
申请公布日期 |
2003.04.16 |
| 申请号 |
EP20010917596 |
申请日期 |
2001.03.29 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
NATORI, EIJI |
| 分类号 |
C23C14/08;C23C16/40;C23C16/44;C23C16/48;H01L21/02;H01L21/31;H01L21/314;H01L21/316;H01L21/8242;H01L27/10;H01L27/108;H01L41/09;H01L41/18;H01L41/316;H01L41/317;H01L41/331;H01L41/39;(IPC1-7):C23C16/40;H01L41/22;H01L41/24;C23C14/22;C23C16/452 |
主分类号 |
C23C14/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
