发明名称 MANUFACTURING METHOD OF DECORATIVE METAL PLATE
摘要 PURPOSE: A manufacturing method of decorative metal plate is provided which forms electric discharge patterns by controlling arc electric discharge generated during glow electric discharge that is plasma electric discharge. CONSTITUTION: The manufacturing method of decorative metal plate comprises deposition process of depositing an oxide or organic matter having thickness of 300 to 500 Å on a sample substrate(30) mounted on a substrate holder(40) inside a vacuum chamber(10); a vacuum degree adjusting process of adjusting degree of vacuum so that degree of vacuum inside the vacuum chamber is maintained to 6x10¬-2 to 6x10¬-3 torr when the deposition process is completed; glow electric discharge process of inducing glow electric discharge by impressing a certain voltage to the substrate when it reaches a set degree of vacuum in the vacuum degree adjusting process; and pattern forming process of forming patterns on the substrate by controlling arc electric discharge generated from the glow electric discharge, wherein the voltage supplied to the substrate in the glow electric discharge process is in the range of -100 to -1000 V.
申请公布号 KR20030029753(A) 申请公布日期 2003.04.16
申请号 KR20010062447 申请日期 2001.10.10
申请人 POSCO;RESEARCH INSTITUTE OF INDUSTRIAL SCIENCE & TECHNOLOGY 发明人 JUNG, CHANG YEONG;JUNG, JAE IN;JUNG, U CHEOL
分类号 C23C14/24;(IPC1-7):C23C14/24 主分类号 C23C14/24
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