Method and scanning electron microscope for measuring width of material on sample

摘要

A method of reducing an error in the measurement of a width of an object (6b, 14a, 18b, 22a, 22b) on a sample (6, 14, 18, 22, 30) when the width has been measured from a secondary signal obtained from secondary particles emitted from the sample scanned by a beam, wherein the error resulting from the diameter of the beam is reduced or eliminated by correcting the measured value with a value relating to the beam diameter (d).