METHOD AND APPARATUS FOR MODELING THICKNESS PROFILES AND CONTROLLING SUBSEQUENT ETCH PROCESS,申请号EP20010950911-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR MODELING THICKNESS PROFILES AND CONTROLLING SUBSEQUENT ETCH PROCESS
摘要
申请公布号	EP1301943(A2)	申请公布日期	2003.04.16
申请号	EP20010950911	申请日期	2001.07.03
申请人	ADVANCED MICRO DEVICES INC.	发明人	BODE, CHRISTOPHER, A.;TOPRAC, ANTHONY, J.
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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